Silicon MIS diodes with Cr2O3 nanofilm Optical morphological structural and electronic transport properties
Yükleniyor...
Tarih
2010-04-15
Yazarlar
Dergi Başlığı
Dergi ISSN
Cilt Başlığı
Yayıncı
Elsevier
Erişim Hakkı
info:eu-repo/semantics/openAccess
Attribution-NonCommercial-ShareAlike 3.0 United States
Attribution-NonCommercial-ShareAlike 3.0 United States
Özet
In this work we report the optical, morphological and structural characterization and diode application of Cr2O3 nanofilms grown on p-Si substrates by spin coating and annealing process. X-ray diffraction (XRD), non-contact mode atomic force microscopy (NC-AFM), ultraviolet–visible (UV–vis) spectroscopy and photoluminescence (PL) spectroscopy were used for characterization of nanofilms. For Cr2O3 nanofilms, the average particle size determined from XRD and NC-AFM measurements was approximately 70 nm. Structure analyses of nanofilms demonstrate that the single phase Cr2O3 on silicon substrate is of high a crystalline structure with a dominant in hexagonal (1 1 0) orientation. The morphologic analysis of the films indicates that the films formed from hexagonal nanoparticles are with low roughness and uniform. UV–vis absorption measurements indicate that the band gap of the Cr2O3 film is 3.08 eV. The PL measurement shows that the Cr2O3 nanofilm has a strong and narrow ultraviolet emission, which facilitates potential applications in future photoelectric nanodevices. Au/Cr2O3/p-Si metal/interlayer/semiconductor (MIS) diodes were fabricated for investigation of the electronic properties such as current–voltage and capacitance–voltage. Ideality factor and barrier height for Au//Cr2O3/p-Si diode were calculated as 2.15 eV and 0.74 eV, respectively. Also, interfacial state properties of the MIS diode were determined. The interface-state density of the MIS diode was found to vary from 2.90 × 1013 eV−1 cm−2 to 8.45 × 1012 eV−1 cm−2.
Açıklama
Anahtar Kelimeler
MIS Diode, Nanofilms, Cr2O3, Metal Oxides, Schottky Barrier, Band Gap
Kaynak
WoS Q Değeri
N/A
Scopus Q Değeri
N/A
Cilt
256
Sayı
13
Künye
Güllü, Ö., Erdoğan, İ.Y (2010). Silicon MIS diodes with Cr2O3 nanofilm Optical morphological structural and electronic transport properties. Applied Surface Science, 256(13). pp. 4185-4191. https://doi.org/10.1016/j.apsusc.2010.01.122
