Wet chemical methods for producing mixing crystalline phase ZrO 2 thin film

Yükleniyor...
Küçük Resim

Tarih

2016-07

Dergi Başlığı

Dergi ISSN

Cilt Başlığı

Yayıncı

Elsevier

Erişim Hakkı

info:eu-repo/semantics/closedAccess
Attribution-NonCommercial-ShareAlike 3.0 United States

Özet

The aim of the study is to develop a more economical and easier method for obtaining ZrO 2 thin films at lower temperature, unlike the ones mentioned in the literature. For this purpose, wet chemical synthesis methods have been tested and XRD, UV-VIS and SEM analysis of ZrO 2 thin films have been performed. At the end of the analysis, we identified the best method and it has been found that the features of the films produced with this method were better than the films produced by using different reagents, as well as the films reported in the literature. Especially it has been observed that the transmittance of the film produced with this method were higher and better than the films in the literature and the others. In addition, refractive index of the film produced with this method was observed to be lower. Moreover, by using the same method Al/ZrO 2 /p-Si structure has been obtained and it has been compared with Al/p-Si reference structure in terms of electrical parameters.

Açıklama

Anahtar Kelimeler

Thin Films, Wet Chemical Method, ZrO 2

Kaynak

WoS Q Değeri

Q1

Scopus Q Değeri

Q1

Cilt

377

Sayı

Künye

Pakma, O., Özdemir, C., Kariper, İ A., Özaydın, C., & Güllü, Ö. (2016). Wet chemical methods for producing mixing crystalline phase ZrO 2 thin film. Applied Surface Science, 377, 159-166. https://doi.org/10.1016/j.apsusc.2016.03.107