Wet chemical methods for producing mixing crystalline phase ZrO 2 thin film

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dc.authorid0000-0003-3147-0526en_US
dc.authorid0000-0002-3454-0027en_US
dc.authorid0000-0001-9127-301Xen_US
dc.authorid0000-0001-6690-0122en_US
dc.authorid0000-0002-3785-6190en_US
dc.contributor.authorPakma, Osman
dc.contributor.authorÖzdemir, Cengiz
dc.contributor.authorKariper, İshak Afşin
dc.contributor.authorÖzaydın, Cihat
dc.contributor.authorGüllü, Ömer
dc.date.accessioned2019-07-05T09:38:33Z
dc.date.available2019-07-05T09:38:33Z
dc.date.issued2016-07en_US
dc.departmentBatman Üniversitesi Fen - Edebiyat Fakültesi Fizik Bölümüen_US
dc.departmentBatman Üniversitesi Mühendislik - Mimarlık Fakültesi Bilgisayar Mühendisliği Bölümü
dc.description.abstractThe aim of the study is to develop a more economical and easier method for obtaining ZrO 2 thin films at lower temperature, unlike the ones mentioned in the literature. For this purpose, wet chemical synthesis methods have been tested and XRD, UV-VIS and SEM analysis of ZrO 2 thin films have been performed. At the end of the analysis, we identified the best method and it has been found that the features of the films produced with this method were better than the films produced by using different reagents, as well as the films reported in the literature. Especially it has been observed that the transmittance of the film produced with this method were higher and better than the films in the literature and the others. In addition, refractive index of the film produced with this method was observed to be lower. Moreover, by using the same method Al/ZrO 2 /p-Si structure has been obtained and it has been compared with Al/p-Si reference structure in terms of electrical parameters.en_US
dc.description.sponsorshipThis work is supported by Prime Ministry of Turkish, State Planning Organization (DPT) (Project number: 2010K120610, Project Title: Batman University Central Research Laboratory).en_US
dc.identifier.citationPakma, O., Özdemir, C., Kariper, İ A., Özaydın, C., & Güllü, Ö. (2016). Wet chemical methods for producing mixing crystalline phase ZrO 2 thin film. Applied Surface Science, 377, 159-166. https://doi.org/10.1016/j.apsusc.2016.03.107en_US
dc.identifier.endpage166en_US
dc.identifier.issn0169-4332
dc.identifier.scopusqualityQ1en_US
dc.identifier.startpage159en_US
dc.identifier.urihttps://doi.org/10.1016/j.apsusc.2016.03.107
dc.identifier.urihttps://hdl.handle.net/20.500.12402/2209
dc.identifier.volume377en_US
dc.identifier.wosqualityQ1en_US
dc.indekslendigikaynakScopusen_US
dc.language.isoenen_US
dc.publisherElsevieren_US
dc.relation.isversionof10.1016/j.apsusc.2016.03.107en_US
dc.relation.journalApplied Surface Scienceen_US
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanıen_US
dc.rightsinfo:eu-repo/semantics/closedAccessen_US
dc.rightsAttribution-NonCommercial-ShareAlike 3.0 United States*
dc.rights.urihttp://creativecommons.org/licenses/by-nc-sa/3.0/us/*
dc.subjectThin Filmsen_US
dc.subjectWet Chemical Methoden_US
dc.subjectZrO 2en_US
dc.titleWet chemical methods for producing mixing crystalline phase ZrO 2 thin filmen_US
dc.typeArticleen_US

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